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1、PECVD设备简介,PECVD全称,PECVD：Plasma Enhanced Chemical Vaper Deposition 等离子体增强型化学气相沉积,机台组成,机台由三部分组成:Automated cassette load station(ACLS)(optional)（Port1、Port2、Port3、Port4）MainframeRemote support system equipment located in a service area outside the clean room,ACLS,The ACLS是 cleanroom 和 mainframe 的交界把白玻璃
2、从 cassettes 传送到 mainframe loadlocks，把完成制程的玻璃从 mainframe 传送回 cassettes包含 ATM robot controller 和 operator control module,Mainframe 组成,主体Double Dual Slot Loadlock（DDSL）Transfer Chamber（TC）Process Chambers(PC)Gas Panel控制制程气体流入 process chambersMainframe control towerHouses the mainframe power distributio
3、n（配电箱）DC power supplies（直流电供应）VME（VersaModule Eurocard bus）controller（集成电路板）,Mainframe,Gas Panel,Mainframe ControlTower,Transfer Chamber,DDSL,Process Chambers,Double Dual Slot Loadlock,Transfer Chamber,View windows,Process Chamber,(RPSC),机台保养（PM）,PM：Preventative Maintenance 预防性保养Daily（日点检）Weekly（周保）
4、Monthly（月保）Quarterly（季保）Half-yearly（半年保）Annually（年保）,Daily Preventive Maintenance,点检各Chamber冷却水流量，CDA、purge N2压力，DI water（Deionization Water 去离子水）水位、电阻值等，是否在规格之内绕机台检查有无泄漏处，查看Pump Warning message,Weekly Preventive Maintenance,测各Chamber的Leak rate,Base pressure,是否在规格之内MQC(machine quality control):Thick
5、ness,U%,particle数量,以及量膜边，是否在规格之内,Monthly Preventive Maintenance,数据备份马达上油更换PadFlowcal,Quarterly Preventive Maintenance,清ScrubberRF calibration更换DI water及Filter,Half-yearly Preventive Maintenance,PC开腔，wet clean更换Grounding更换PC Lid O-ring,Gas line O-ring,TC Lid O-ringSpacing calibration,Annual Preventive Maintenance,机台断电，解决各种问题,装机,Tier 0：机台定位，开孔，hook upTier 1：subfab&fab水电气的连接；送特气；leak rate；interlock check；hand off；throttle valve,MFC&RF calibration。Tier2：thinkness；depo rate；etch rate；U%的确认以及机台小中大量试验,THE ENDTHANKS,
