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1、1,气体输送系统安全,2,气体输送系统安全,After this training,you will be able to:了解半导体/电子行业气体种类及特性了解低温气体的危害及防护了解如何确保气体输送系统安全了解如何正确操作钢瓶了解gas-handling设备及其功能了解系统输送系统的部件及其功能了解gas cabinet和VMB/P,3,设计准则,气体输送系统的三大设计准则 Safety Process Control 工艺控制（流量、压力等）Purity Control 纯度控制（纯度/颗粒度）,4,气体分类一,根据气体储存形式不同，分为：Bulk Gas 大宗气体（特指Ar,N2,O2
2、,He,H2）Specialty Gas 特种气体(SiH4,NH3,CF4,etc.)Compressed Dry Air干燥压缩空气,5,气体分类一大宗气体,Bulk Gas 大宗气体-N2/Ar/O2通常半导体工厂，厂务N2/Ar/O2以液态储存在槽罐内,6,气体分类一大宗气体,低温液体在常压下沸点低于-240oF(-115oC)例如O2液化温度(-297 oF)(-183oC)Ar液化温度(-302 oF)(-186oC)N2液化温度(-320 oF)(-196oC)oC=(oF-32)*5/9,7,气体分类一大宗气体,低温液体危险性低温蒸气扩散低温液体可能引起冻伤,8,气体分类一大宗
3、气体,低温气体的其它危险低温可能会引起周围物品的损伤危险危险包括过冷过大的体积膨胀雾,9,气体分类一大宗气体,低温引起的破裂,10,膨 胀 率,11,气体分类一大宗气体,低温危险防护提供排风系统正确操作气瓶正确的系统设计适当的个人防护设备,12,气体分类一大宗气体,Bulk Gas 大宗气体-H2/He由于H2和He的液化温度极低，加之自然界游离态气体极少，故H2和He一般以高压气态形式储存在钢瓶内（国外使用液态储存），并且以钢瓶组供应H2常用电解水得到，He从矿石中提炼得到（绝大部分产自美国）H2液化温度(-423 oF)(-253oC),He液化温度(-452 oF)(-269oC)绝对零
4、度为-273oC,13,气体分类一特种气体,什么是Specialty Gas特种气体大宗气体&CDA以外的气体空气中极稀有气体（如Xe 氙气）不存在空气中，人工合成之气体（如AsH3砷烷）特殊用途之超高纯气体（又称电子级气体）,14,气体分类二,根据气体危险性，气体分为：不可燃气体(N2,SF6,NF3等)可燃性气体(H2,SiH4,CH4等)氧化性气体(O2,N2O等)毒性气体(AsH3,PH3等）腐蚀性气体(Cl2,DCS等）,15,气体分类二常见危险符号,不可燃性等级,可燃性等级,氧化性等级,毒性等级,腐蚀性等级,16,气体分类二不可燃气体,常见不可燃气体种类（通常指类似的惰性气体）不可
5、燃气体之危险性窒息性 取代肺中的氧气压强 单位面积所承受的压力能量 气体在状态转变过程中产生的能量,17,气体分类二不可燃气体,氧气被其他气提所取代之危害:19.5%人类正常生活所需要的最低氧气浓度极限15-19.5%工作能力下降，冠状动脉，肺部和循环系统出现先期症状，12-14%呼吸，脉搏加快，渐渐失去知觉10-12%呼吸，脉搏进一步加快，丧失判断能力，嘴唇发紫8-10%无意识，呕吐6-8%8 分钟死亡率100%，6分钟死亡率50%，4-5分钟尚可恢复4%40秒钟内昏迷，抽搐，停止呼吸，直至死亡,18,气体分类二可燃气体,常见可燃气体种类H2/SiH4等可燃气体之危险性窒息性压力可燃性爆炸可
6、能性,19,气体分类二可燃气体,20,气体分类二可燃气体,燃烧过后的不锈钢气瓶,21,气体分类二可燃气体,可燃性气体的危险防护保证空气的流动，配备排风正确的钢瓶操作流程使用防爆设备避免任何火化产生的可能,22,气体分类二氧化性气体,用途：O2 无法呼吸时，医生会用来维持呼吸 N2O-“笑气”，牙医会用来做麻醉剂 这种气体怎么会有危险性?,23,气体分类二氧化性气体,引燃物,燃料 氧化,燃烧三角形（三者缺一不可）,普通燃料木头碳燃气燃油,氧化物燃料铝不锈钢碳钢,引燃物压缩且隔热(如柴油机)冲击高速度摩擦其他引燃物,24,气体分类二氧化性气体,用于氧化性气体输送系统的材料必须:材料兼容（与活泼的氧
7、化性气体不反应）对材料系统作特殊清洁处理(Oxygen clean)过高含氧量的危害当含氧量=23.5%时，燃烧特性发生改变可燃范围增大自燃温度下降通常不会燃烧的物质在高氧环境会燃烧通常会燃烧的物质在高氧环境会极易燃烧，且燃烧速度极快,25,气体分类二氧化性气体,氧化性危险防护提供排风系统正确操作气瓶使用相容的原料避免引燃点确认系统经过适当的清洗,26,气体分类二毒性气体,例如AsH3PH3B2H6毒性气体之危险性对身体毒害中毒途径吸入通过皮肤吸收吞食注射,27,气体分类二毒性气体,专业术语TWA(Time Weighted Average)工人每天8小时，每周40小时，无任何防护措施的情况下
8、允许的最高接触浓度，并且不会对人体产生伤害。TLV(Threshold Limit Value)ACGIH允许的最高接触浓度，等同于TWAPEL(Permissible Exposure Limit)OSHA（美国职业安全与卫生管理局）建议的最高接触浓度。Ceiling 工作中绝对不可以达到的最高浓度。IDLH(Immediately Dangerous to Life and Health)NIOSH（国立职业安全与健康研究所）允许的30分钟最高接触浓度。LC50(Lethal Concentration 50%)CGA（美国压缩气体协会）提出的 1小时内有50%可能性死亡的浓度。,28,气
9、体分类二毒性气体,到底有多毒?,CO一氧化碳的毒性,容许浓度,体积浓度(ppm-part per million百万分之一),29,气体分类二毒性气体,有毒气体危险防护提供排风系统正确操作气瓶毒气监测系统适当的个人装备培训,30,气体分类二腐蚀性气体,低腐蚀性HFBCl3SiCl4高腐蚀性HClBF3DCS腐蚀性气体之危险性摧毁人体生理组织腐蚀设备以下几种气体的危险性来自腐蚀性HF,BCl3,SiCl4,31,气体分类二腐蚀性气体,被腐蚀的瓶口阀,32,气体分类二腐蚀性气体,腐蚀性危险的防护提供排风系统正确操作气瓶采用相容的原材料降低含水量适当的个人防护设备,33,气体分类二腐蚀性气体,操作腐
10、蚀性气体所应配备的个人防护设备橡胶防护服橡胶手套面具SCBA可选,34,气瓶操作,35,气瓶操作,单瓶运输车,36,气瓶操作,双瓶运输车,37,气瓶操作,多瓶运输车,38,气瓶操作,不要通过旋转来移动气瓶,39,气瓶操作,气瓶操作原则不要机械撞击气瓶不要用气瓶作为滚轮不要通过气瓶盖吊升气瓶不要用磁铁或吊索吊升气瓶不要通过旋转来移动气瓶固定住气瓶,40,气瓶操作,高温会引起瓶内压力上升低温会引起瓶体易碎和瓶口阀实效,41,谢谢您的支持！,上海至纯洁净系统有限公司,42,半导体厂房的气体供应方式,PipelineCylindersY Cylinders/ISO ModulesTube Traile
11、rs Cryogenic Tanks,43,气体供应方式,Bulk 大宗气体 Large quantity 3 methods may be supplied to the fab1.Nitrogen plants and pipelines N2空分站及管网2.Cryogenic liquid 深冷液体供应3.Tube trailer 鱼雷管（针对H2/He）,Cylinder 气体钢瓶Small quantityMost labor intensive1.Cryogenic liquid cylinders(dewars)杜瓦供应2.Gas cylinder 气体钢瓶,44,Onsite
12、plants 室外空分站 厂务氮气 Fab size 30,000 sq ft(2787m2)Reliable(oil free compressors),Pipeline Commonly Nitrogen Reliable Multiple Customers,气体供应方式N2空分站及管网,45,2/17/97,6,大宗深冷液态气体,Why do we cool gas to a cryogenic state?NitrogenOxygenArgonHydrogenHeliumLiquid temperature:-183C(O2)to-423(H2),46,大宗深冷液态气体,Cryoge
13、nic liquid+heat=gasLiquid-to-gas expansion ratio from 694(N2)to 857(O2)液态到气体的膨胀率694(N2)-857(O2),47,Storage&Supply System,48,Vaporizers蒸发器 provide the heat that converts the liquid back to a gas.Advantages:high reliability and low power(energy)cost.高稳定性和低能耗Disadvantage:the gas can be heated only to a
14、mbient temperature.气体只能升温至环境温度Sized by both peak and continuous flow.根据持续的最大流量来选择蒸发器规格。Require usage patterns,peak flows and their duration,and monthly volumes for correct sizing.根据实际使用模式、最大流量及其持续时间和月消耗量来更正蒸发器规格。,Storage&Supply System,49,Storage&Supply System,Purification 纯化Many fab gas supply syste
15、ms use onsite equipment to further purify the gases.半导体工厂通常使用纯化装置来纯化气体,50,Storage&Supply System,Pressure Regulation&Filtering气体经过m以下级的过滤装置和减压阀组,51,Tube Trailer Supply,52,Each type of cylinder gas will exhibit different characteristics.,Types of Cylinder Gases,53,Compressed&Liquid Gases,Compressed Ga
16、s 压缩性气体Easily transported through piping to the point of use(POU).通过管网容易输送至各使用点Pressure depletion in the cylinder allows the cylinder content to be monitored.可以通过瓶内压力的降低，监测钢瓶剩余气体量The pressure drop will be seen on the high pressure side of the gas delivery system.压力降可以在气体输送系统的高压侧看到。As the pressure in
17、 the gas cylinder is depleted,the delivery pressure will increase(equalize).,54,Compressed versus Liquid Gases,Liquefied compressed gas液化性压缩气体:a gas that,when compressed in a cylinder,becomes liquid at ordinary tempeatures.常温下，气体在钢瓶内被压缩成液态。Boiling points range 沸点范围from-130oF(-90oC)to 30oF(-1oC).At 7
18、0oF the cylinder contains both liquid and gas.在室温20oC时，钢瓶内为液气共存。Cylinder pressure(vapor pressure VP)is directly affected by ambient temperature.钢瓶内压力（蒸发压）直接受环境温度影响。Demand for the product can cause the vapor pressure to drop off and create a JT effect.气体的需求量会产生蒸发压的降低并产生一焦耳能量,55,Joules-Thompson(JT)Eff
19、ect,56,Cylinders:35+Gases,常用钢瓶规格:40L大钢瓶和8L铝瓶以N2为例：一个40L钢瓶内，可以容纳6标准立方米的N2,57,Cylinder Liquid Dewar,Function:The dewar cylinder is used for significant spot requirements where there is no bulk house gas supply.杜瓦适用于无液槽罐供应，但消耗量有较大的情况下。单个杜瓦的最大供气量150slpm,应用于N2/O2/Ar,等同于10-12个钢瓶气量,通过盘管式蒸发器,压力和温度波动,58,Cyli
20、nder Materials,What materials of construction are cylinders made from?钢瓶材质The materials can besteel,钢（使用最普遍）aluminum,铝nickel,镍stainless,不锈钢Monel，镍合金Steel construction is the most inexpensive and monel is the most costly to produce.,59,Fab Gas Handling Equipment,Cylinder gas cabinet 气柜Valve manifold
21、box/P VMB/P阀组箱/盘Valve stand Gas isolation boxGas jungle 混气盒,60,Gas Flow,61,Distribution Piping,1.Bulk Gas PipingThe bulk gas delivery lines are supplied from a cryogenic tank,tube trailer or bundlesThe main header will branch off into various process areas.These lines may feed through a purifier.2.C
22、ylinder Gas PipingCylinder gas delivery line is supplied from the gas cylinder to the customers production tool.The layout of a gas distribution system is determined by the customers needs and cleanroom design.,62,Bulk Gas Distribution System,Ultra High Purity(process)systemBulk gas distribution pip
23、ing systems are characterized by large pipe sizes with multiple branches and tool hook-ups.All delivery lines should be labeled with the line content and flow direction.All valves must be labeled.,63,Cylinder Gas Distribution Piping System,Smaller tubing sizes and fewer tool hookups.Valve manifold b
24、oxes(VMBs)Two design philosophies:1.1 cylinder/1 tool 2.Switchover Systems or VMBs,64,Materials of Construction,Typical Materials of pipe or tube construction for the gas industry,65,Cylinder Gas Cabinet,66,A Variety of Gas Delivery Systems,Examples:APCI GG250,450,500NorcimbusSemi gasATTOCVDKC-TechT
25、he technician must know and understand the systems in use at the facility.,67,Valve Manifold Box(VMB)阀组箱,A cabinet for splitting a single gas supply line into multiple supply branches for process equipment一个气瓶通过VMB同时供应多台设备。Each branch operates independently各个分支独立控制 Manual or automatic operationRepla
26、ces as many as 8 cylinder gas cabinets 最大可至8个sticks，即1进8出。,68,Valve Manifold Box(VMB)阀组箱,69,Valve Manifold Box(VMB)阀组箱,70,Gas Jungle混气盒,71,Gas System Components,1.Piping/tube2.Valves3.Regulators4.Pressure indicators5.Excess flow devices6.Filters7.Purifiers8.Mass flow controllers,72,Piping/Tube,Polym
27、er-nylon,plastics,etc.MetalsCopper,304 SS,316 LSS,316 LSS VAR,Hastelloy,73,Piping/Tube,Metal Treatments2 types:1.Polish抛光:Chempolish(acid)CP化学抛光Electropolish EP电解抛光2.Passivation钝化:Oxygen PassivationFluorine PassivationMechanical FittingsCompression 双卡套接头Threaded 螺纹接头Vacuum 真空接头Face seal 面密封接头VCR,74,
28、VCR Mechanical Fitting,75,Moisture Permeation Through Plastic Tubing,塑料材料很少使用在半导体行业的气体输送系统上，因其有透湿性。,76,Valve Types,There are 4 types of valves used in a fab gas system:1.Shutoff截止阀2.Check单向阀3.Safety安全阀4.Cylinder钢瓶阀,77,Shutoff Valves,Packed Seal Valve填塞密封阀（针阀等）Bellows Seal Valve波纹管密封阀Diaphragm Seal V
29、alve隔膜阀,78,Check Valves,79,Safety Relief Valves,80,Cylinder Valves,The tied diaphragm valve is the primary valve used in specialty gases.隔膜阀是特气输送系统中首选阀门。,81,Regulators,82,Regulator Discharge Characteristics,High Purity,Single-stage SSHigh Purity,Two-stage Regulator Regulator,83,Regulator Terminology
30、,Refer to Participant Guide Appendix,84,Pressure Indicators,Three types of devices that indicate pressure.1.Pressure Gauge2.Pressure Indicator3.Pressure Transducer,85,Pressure Indicators-Pressure Gauge压力表,仪表管内颗粒聚集，吹扫困难1%误差本地直接读数三通安装形式压力单位 100psi=7bar=0.7MPa表压力为相对压力，绝对压力相对压力+大气压,86,Pressure Indicator
31、s-Pressure Transmitter压力传送器,带继电器信号输出的压力表无需电源,87,Pressure Indicators-Pressure Transducer压力变送器,0.1%full scale accuracyRequires electrical power source.Tee installation or inline install.Excellent purgability.Pressure transducers are superior to gauges in accuracy,particle,and performance.,88,Excess Fl
32、ow Devices,在气体输送系统中，判断一个异常大的气体流量The rating of the excess flow device installation is determined by the process flow requirements.There are two types of excess flow devices:1.Excess flow valve2.Excess flow switch,89,Excess Flow Devices,90,Filters,Purposes:去除气流中的颗粒过滤器的重要性过滤效率,91,Gas Filter Selection C
33、riteria过滤器选型准则,Flow rate 气体流量Gas Compatibility 与气体的兼容性Corrosives 腐蚀性Reactants 反应物Outgassing performance 透气性能,92,Gas Filter Selection Criteria过滤器选型准则,Temperature 气体温度Pressure 气体压力Particle Retention Rating 颗粒截获率,93,Filter Materials,Evaluation of a filter should include all components of the filter.The
34、 elastomeric or teflon filter is the most economical and common filter.特氟龙是最常用且经济的过滤材质Filter components*Housing 滤壳*Media 过滤芯*Media to housing seal 滤壳的密封*Support structure(elastomeric)滤芯的固定架,94,Filter Materials,Filter media 过滤材质*Elastomeric 塑料材质*Ceramic 陶瓷*Metallic 金属316 LSSHastelloy C-22Nickel,95,Pu
35、rifiers,There are two types of purifiers:1.getter(metal)-regenerable2.chemical resin,96,Purifiers-Applications,Easy maintenance/changeSafetyLife tracking by cylinder changesIncrease panel&piping life(corrosion,contamination)Purge gas purifier improves cylinder purge,97,Purifiers-Applications,Other a
36、pplicationsEpi/CVDSputtering(metal applications)There maybe multiple purifiers located in the Argon delivery lines.The metal process must be particle free.If particles are present they could cause shorts or opens in the metal lines.Corrosive/reactive gas,98,Gas Properties Challenging Flow Control,Am
37、monia(NH3)Liquefied compressed gasBoron Trichloride(BCl3)Liquefied compressed gas,99,Gas Properties Challenging Flow Control,Chlorine(Cl2)Liquefied compressed gasDiborane(B2H6)Compressed gas,100,Dichlorosilane(SiH2Cl2)Liquefied compressed gasDisilane(Si2H4)Compressed gas,Gas Properties Challenging F
38、low Control,101,Gas Properties Challenging Flow Control,Hydrogen Bromide(HBr)Liquefied compressed gasHydrogen Chloride(HCl)Liquefied compressed gas,102,Hydrogen Fluoride(HF)Liquefied compressed gasNitrous Oxide(N2O)Liquefied compressed gasSilane(SiH4)Compressed gasTungsten Hexafluoride(WF6),Gas Prop
39、erties Challenging Flow Control,103,Testing&Analysis 测试及分析,高纯气体管道需如下测试（尤其适用高危险性特气系统）：Press test压力测试?m(每立方英尺大于?的颗粒数不大于?个)，测试仪器 PMS-u-LPC-101-HP针对6”Fab的特气系统通常0.1umMoisture Increase Analysis水分增量分析 ppb(十亿分之一)，测试仪器Meeco/Ametek针对“Fab的特气系统通常50ppbOxygen Increase Analysis氧分增量分析 ppb(十亿分之一)，测试仪器Delta-F针对“Fab的特气系统通常50ppb,
