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1、1/31/20231,Chemical Hygiene PlanSafety Manual,Bob Hamiltonbob at eecs.berkeley.edu,1/31/20232,#1 Rule,No one may work alone in the NanoLab!Failure to follow rules can result in suspension of lab privileges.Will be warned if logging in alone,or if logging out would leave someone alone.Can find who is
2、 in the lab through MercuryWeb.During non-staff hours,confirm presence of another lab member.,1/31/20233,Safety Test and Quiz,Passing the SAFETY TEST qualifies a NanoLab member to work in the NanoLab.Qualified on“NANOLAB”and virtual equipment“chp”Passing an annual,online Safety Quiz is required to r
3、enew membership.Lab members receive an automatic email reminder when your safety quiz is due.Revisions to Chemical Hygiene Plan are posted in Revision history and should be regularly reviewed:,1/31/20234,Telephone System Information,The laboratory has an independent telephone system:You cannot dial
4、campus numbers with only 5 digits.You can dial lab numbers with only 3 digits.Use“all call”to page staff or other members in the lab.During staff hours dial“0”to reach the NanoLab officeYou must dial“9”to dial an outside number:Both“9 911 and 911 will reach an emergency operator.For emergencies dial
5、 9-1-1 from any lab phone.If you use your cellular phone,call campus police at 510-642-3333,1/31/20235,1/31/20236,Emergency Response,In event of fire:Pull a red fire alarm pull station.Pull a blue Hazmat alarm pull station.Evacuate the building.In event of medical emergency:Call 911 if life threaten
6、ing.Visit Tang Center for minor injuries.If Tang Center closed,the Trauma Center at Alta Bates Hospital on Ashby and Telegraph is at all hours.In event of flooding or utility problem:Contact staff.Shutoff water supply if you can identify the source.If there is a non-NanoLab building issue:Contact ca
7、mpus hotline at 510-642-1032.Follow up with call to building manager Domenico Carmagno at 510-502-6025.If you call an EMERGENCY phone number on left,follow-up with a call to a number on right.,1/31/20237,Blue Hazmat pull stations are located at every emergency exit and at several locations throughou
8、t the lab.Lab members shoulduse these pulls when they believe the lab should be evacuated:hazmat activates blue lights and audible alarm.hazmat seals all hazardous gases.hazmat notifies a 24 hour alarm company.that then contacts laboratory staff.-hazmat does not call 911.-If blue light is flashing u
9、pon arrival,you may NOT enter the lab.At each lab entrance is a Firefighter Restricted“break glass”emergency ventilation pull station.This station turns off air recirculation and putsthe lab in a state of maximum exhaust.Lab members are Never allowed to activate this pull station!,Blue Hazmat Evacua
10、tion Pulls,1/31/20238,NanoLab Evacuation Procedure,Secure your process.As you proceed to a blue emergency exit door ask other lab members to follow.Exit the building.If after hours,bring a phone list from the exit door.The assembly area for an Emergency Exit from the NanoLab is NE of the Hearst Ave
11、stairwell.The assembly area for SDH is to the West of the Qual Comm CafRemain available to pass on details you have about events that lead to an evacuation.Such information is useful.,1/31/20239,Blue Strobe Lights,If the blue strobe light is flashing you must evacuate the lab.This indicates a potent
12、ial or real hazardous condition.Exit the NanoLab using the Emergency Exit doors.All such doors are painted blue.(All doors painted blue are emergency exit doors).Do not exit the lab using the main entrance doors unless absolutely necessary.A blue strobe is located just inside the lobby doors at ceil
13、ing level.If you arrive at these doors and see this light flashing do not enter the NanoLab.If you evacuate the lab and have Information about the cause of the event please get in touch with a NanoLab staff.A blue strobe flashing indicates is a localized event.It does not automatically summon the fi
14、re department or police.You do not have to leave SDH.You may re-enter the NanoLab once the cause of the is known and the alarm is acknowledged-lights off and horns silenced.,1/31/202310,NanoLab Assembly Area,1/31/202311,SDH Building&NanoLab Office Emergency Assembly Area,X,11,1/31/202312,Clean Gowni
15、ng,Proper attire requires before entering cleanroom:Goggles,bouffant cap,nitrile gloves,shoe covers,gown,boot covers.Safety glasses must be worn at all times!Safety Glasses must comply with OSHA standard:1910.133 Prescription Safety glasses available through UC Optometry DepartmentContact lenses dis
16、couraged:They can trap abrasive chemicals next to eyes.No sandals,open toe shoes,hi-heels or bare feet.Shorts allowed under full coverall suits.,Cleanroom Face Mask Is Not A Safety Device!,1/31/202314,General Laboratory Practices,Walk,do not run while in the lab.Food or drinks are not allowed in the
17、 NanoLab.Cellular phone use is permitted in gowning area and main lab aisle,along west-windows.Use of music players is allowed only in the gowning area only.Visitors are allowed on by pre-approval.Request permission request via:visitor at silicon.eecs.berkeley.eduAlways remove your gloves as you exi
18、t the laboratory.It is recommended lab users wash their hands after leaving the NanoLab or other Campus labs.,1/31/202315,The laboratory is equipped with ten safety Shower/eyewash systems.Five of these are sited in fully-equipped Safety Stations located between bays.Each safety station is equipped w
19、ith:Safety showerEyewashFirst Aid KitChemical Spill clean up kitHF burn paste and pH test strips*Two Safety Stations are equipped with defibrillators,Eyewash,Showers,Safety Stations,1/31/202316,Use of Safety Stations,First aid:Minor injuries can be treated at a Safety Station with a first aid kit.Re
20、port all use of the first aid kit on Mercury under equipment named“safety”.Serious injuries require medical attention.Use 911 from any phone to summon help.If a 911 call is not required lab members should seek treatment at the Tang Student Health Center during open hours or a hospital trauma center,
21、such as Alta Bates Emergency.All injuries requiring treatment must be reported to the NanoLab office within 24 hours or,on the following Monday if an injury occurs on a weekend or holiday.Reports are made in person or via phone,not on-line.,1/31/202317,Chemicals,Common chemicals are supplied by the
22、NanoLab.For use in NanoLab ONLY.Chemicals are stored in lab member accessible labeled cabinets throughout the lab.Chemicals are also stored in rolling carts under the sinks.View available chemicals on Mercury.,1/31/202318,Special Chemicals,A“Special Chemical”is a proper name for any chemical not sup
23、plied by the NanoLab.Special Chemicals must be approved prior to bringing them into the NanoLab.Approval Process:Obtain a Material Safety Data Sheet(MSDS).Email MSDS to Chemical Safety Officer Bill Flounders(bill at eecs.berkeley.edu)and request special chemical review.If approved,when you obtain yo
24、ur chemical,visit the NanoLab office to obtain a red“Approved Special Chemical”label.Even if previously approved,additional purchases of the same chemical must go through the approval process to maintain up to date chemical inventories.It is recommended that you complete the approval process prior t
25、o ordering chemical.Special Chemicals may require special hazardous waste disposal methods.,1/31/202319,Transporting Chemicals,Lab members are NEVER allowed in the chemical storage areas within the gas vaults,rooms 399 and 599 without staff escort or prior approval.Make sure there are no open bottle
26、s of desired chemical already in the area.Use safety carriers to move bottles within the NanoLab.Store opened standard chemicals in designated areas near the sinks.Notify staff if there is no stock of a chemical.Chemical transport between levels is to be minimized:No chemicals are allowed in the lab
27、 passenger elevator.Always use bottle carriers in the stairs or the chemical“dumb waiter”.,19,1/31/202320,Chemical Transport,“Dumb Waiter”,1/31/202321,Working with Chemicals,All wet chemical work must be performed at a NanoLab sink.:You must wear protective equipment(PPE)when working with any chemic
28、als:Chemically resistant gloves,face shield&apron.You must wear chemically-rated gloves,chemical resistant apron and a face shield when working with any chemicals.The only exception to this rule is the tri-polymer chemically resistant gloves are not required when handling small amber bottles of phot
29、oresist.,1/31/202322,Working with Chemicals,Respirators are not required when working with standard or approved Special Chemicals at NanoLab sinks.NanoLab sinks are annually certified as fume hoods.If your process requires you to handle chemicals outside of a NanoLab sink,review your process with Ch
30、emical Safety Officer Bill Flounders.Incidental use of isopropanol,methanol,or acetone squeeze bottles outside of NanoLab sinks is permitted.Cal-OSHA requires all chemical containers to be labeled with their content!,22,1/31/202323,Working with Chemicals,Always add acid to water.Exception being Pira
31、nhaDo not use glassware with HF acid.Ongoing processed must be labeled for chemical content,contact information date and time of return.Place setups toward the back of fume hood where there is maximum exhaust.Clean unidentified spills by:Checking pH with a test strip.If strongly acidic or basic(pH 1
32、0)use a sink hose to flush into the sink.If neutral,mop up with Techni-cloths.All chemicals must be stored in proper containers with the contents identified!,1/31/202324,Dry Chemicals,Measure dry chemicals by pouring into weigh boat or weighing paper:Always use a clean spatula if scooping is necessa
33、ry.Never return chemicals to the source bottle.All chemicals must be labeled and stored in proper containers,i.e.no beakers with foil or unlabeled dry chemicals.,1/31/202325,Storing Chemicals,1/31/202326,Chemical Disposal,Does it contain metal ions?,yes,Is it non-halogenated water soluble solvent or
34、 acid or base?,Is it water immiscible or halogenated solvent?,Take to msink 1,16,18,Is Organic waste bottle more than 75%full?,Pour in funnel,yes,yes,Replace full with empty bottle,capping full one lightly,Take full to Chemical Disposal Cabinet in 582A,Complete and attach HAZMAT sticker,fill out Che
35、mical Disposal Manifest,no,Aspirate in sink,Did you receive Special Chemical approval?,Stop,see Chemical Safety Officer,no,no,yes,no,Follow disposal guidelines provided during Special Chemical review,yes,Treat as photoresist,Collect separately,no,1/31/202327,Chemical Bottle Disposal,Take empty bottl
36、es of drain disposable chemicals to the automated bottle rinse station in 582a.Rinse using the in foot-peddles of the bottle rinse station.Wearing a face shield and gloves.Cross out label with an x and place in bins near the rinse station.Empty bottles of non-drain disposable solvent bottles should
37、be placed in rear of fume hood to allow bottle to dry out,then put in a trash can.Bottles of silicon etch should be washed and placed in marked bin in 582A for refilling.,1/31/202328,Chemical Waste Bottles,1/31/202329,Photoresist&Spin Coatings,Residues from spin coating such as aluminum foil,cleanro
38、om wipes,swabs,etc,that contain volatile solvents should be disposed of in the vented waste cans located at msink1 and msink3.,29,1/31/202330,Chemical Exposures,Remove the affected clothing.Rinse the exposed areas with water for 15 minutes using a safety shower or eyewash.Notify staff after exposure
39、 using the posted Emergency Contact Information.In an emergency,the deck hoses are usually your closest source of water.,1/31/202331,Eye Exposure,If eyes are exposed:Flush eyes for at least15 minutes NOT LESS!Use an eye-wash.Sinks have DI deck guns which can be used followed by an eye wash.Contact s
40、taff for assistance or cal 911.Follow up eye exposures with visit to a medical professional.All eye exposures require a follow up visit to Tang Center or a hospital emergency room.Lab members should assist a colleague in the event of an eye exposure!,31,1/31/202332,HF Burns,HF acts as an anesthetic,
41、you may not feel the burn until damage is already done.If exposed:Remove affected clothing,flush with cold water for 15 minutes.Massage calcium gluconate ointment from safety stations onto exposed area.Notify staff after exposure,using posted Emergency contact information.,1/31/202333,TMAH,TMAH is u
42、sed as photoresist developer It is hazardous by ingestion,inhalation,skin exposure or eye contact.Exposure to concentrations 15%may cause respiratory or heart failure.Flush expose area with water for 15 minutes.Notify staff after exposure,using posted Emergency contact information.,1/31/202334,Chemi
43、cal Spills,During staff hours,contact a staff member.Contain spills using the Spill Containment Kit available at Safety Stations.Contact staff for assistance using the posted emergency contact information posted at every phone.Final spill cleanup must be done by trained staff certified for spill cle
44、anup.,1/31/202335,Toxic Metals,General practices for handling metals:Consider all metal dust as potentially hazardousMinimize quantitiesProtect bench top with disposable covers.Confine material as you workChange gloves when leaving the areaSolutions used for etching of toxic materials requires prope
45、r disposalConfine dust-use dampened lab wipes to collect metal dustContact staff for proper disposal of cleaning materials contaminated with toxic metals Mechanical cleaning should be done with fume hood at 200 ft per minute face velocity and a HEPA vacuumDo not use N2 blowoff guns-use a HEPA vacuum
46、New evaporation sources or sputter targets must be reviewed as Special Chemicals,1/31/202336,Work with Gallium Arsenides or other highly toxic metals must first be reviewed with Bill Flounders!Follow the same procedures as outlined for:SPECIAL CHEMICALS,36,1/31/202337,Sharps&Dangerous Objects,Dispos
47、e broken glassware in yellow trash pails labeled“broken glass”.Dispose Si wafers in the blue Si wafer recycle bins.Dispose needles,razor blades,and other sharp objects in red“SHARPS”bins.Mercury thermometers are banned from the lab.Contact lab staff in event of a mercury spill.Batteries and electron
48、ic waste disposal is via the NanoLab office to assure proper disposal.,1/31/202338,Cylinder Gases,Lab members are not allowed to handle compressed gas cylinders.Corrosive and Toxic Gases are kept in the dedicated gas vaults,room 399 and 599.Gases are stored in ventilated steel gas cabinets.Toxic Gas
49、es are monitored by the Toxic Gas Monitoring system,which will shut them off at source if leak is detected or if HAZMAT alarm is pulled.Lab members are NEVER allowed in the gas and chemical storage areas,rooms 399 and 599 without staff escort or prior approval.,1/31/202339,Radiation Sources,Lasers a
50、re banned without the approval of Bill Flounders(bill at eecs.berkeley.edu).More information on safe use of lasers at http:/nanolab.berkeley.edu/factsheets/74lasersafety.pdfIonizing Radiation is produced at the scanning electron microscopes and the x-ray diffractometer.Those working in the presence
