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1、CONFIDENTIAL,晶体生长模拟FEMAG蓝宝石生长模拟方法,FEMAGSoft S.A.,BelgiumA SPIN-OFF company fromUniversite catholique de LouvainBelgiumProfessor F.Dupret,CONFIDENTIAL,General introduction Sapphire Growth,Content,CONFIDENTIAL,Introduction,For more than 25 years,FEMAGSoft develops simulation software dedicated to the
2、research and development of optimal crystal growth processes.1984 First research on Germanium growth in University of Louvain.Prof.Franois Dupret1989 First research on Silicon growth in University of Louvain.1992 First collaborations with major IC companies.Development of defect-free silicon wafer p
3、roduction.Today,more than 35 patents are referencing FEMAG Software2003 FEMAGSoft S.A.,spin-off from University of Louvain.2006 Collaboratrion with major Solar companies.Development of low-cost and low-oxygen content processes.2009Large investment for a new software framework2010 Release of Software
4、 application for Sapphire ingot production.,CONFIDENTIAL,Czochralski process,CONFIDENTIAL,Directional Solidification System,CONFIDENTIAL,Floating Zone Process,CONFIDENTIAL,Sapphire Growth by CZ and kyropoulos,CONFIDENTIAL,Sapphire growth by HEM,CONFIDENTIAL,What are FEMAG software?,Process-dedicated
5、 simulation tools,adapted to your own processes and able to solve your problems.Global All the furnace components are considered.All the heat transfer mode are considered(radiation transfer,heat conduction,melt and gas convection)Induction and ohmic heatingTime Dependent,CONFIDENTIAL,Process-dedicat
6、ed tools,FEMAG-CZ:CzochralskiFEMAG-FZ:Floating Zone FEMAG-VB:Vertical BridgmanFEMAG-CZ/OX:Czochralski for SapphireFEMAG-KY:KyropoulosFEMAG-DS:Directional SolidificationFEMAG-HEM:Heat Exchange Method,Gain of time.Process mastering Accurate and right to the point,CONFIDENTIAL,Platform oriented,FRAMEWO
7、RK:FEMAG3,RADIATION,CONVECTION,MESH,GEOMETRY,CONDUCTION,FEMAG-CZ,FEMAG-HEM,FEMAG-DS,FEMAG-KYROPOULOS,FEMAG3 NEW 2011Very accurate:Finite Element and Spectral methodsVery efficient:3D simulations in less 1 dayVery flexible:Very fast development of new demand,CONFIDENTIAL,Global simulations,Czochralsk
8、i Furnace for Silicon,HEM Furnace for Sapphire,No simplification of the process conditions,CONFIDENTIAL,Dynamic simulations,A dynamic simulation toolComplete process simulationDynamic effect of interface deformation Varying processing conditions,CONFIDENTIAL,Sapphire Crystal Growth Simulation,CONFID
9、ENTIAL,Sapphire Simulation Objective,The market of Sapphire is experiencing a very fast growth rate and become very competitiveMany companies invest in simulation software in order to reinforce their positions HEM,Czochralski and Kyropoulos process require optimization and a good understanding Stron
10、g need for efficient numerical tools.Radiation effects in the participating crystal and melt is a complex problem.,CONFIDENTIAL,Sapphire Simulation Objective,Our goal is to provide accurate simulation tool,able to take all the process features into account and to optimize the growth process in terms
11、 of the resulting crystal quality.,CONFIDENTIAL,Sapphire Simulation Objective,KYROPULOS,CZOCHRALSKI,HEM,CONFIDENTIAL,FEMAG-CZ/OX,FEMAG-CZ/OX Software to simulate Sapphire Growth by CZ and KyropoulosSpecifications:Temperature in the sapphire and in all furnace components by solving the global heat tr
12、ansfer in the furnace(radiation,conduction,convection).Flow velocity in the sapphire liquid phase.Crystallization front shape Ohmic and Induction HeatingAdvanced radiation heat transfer in the sapphireGas convectionAnisotropic thermal stresses in the crystal,CONFIDENTIAL,Temperature in the Hot Zone,
13、FEMAG-CZ/OX,CZ processwith Induction Heating system,Induction Heating system,CONFIDENTIAL,Temperature in the crystal and in the melt,FEMAG-CZ/OX,CZ processwith Induction Heating system,CONFIDENTIAL,Melt velocity amplitude,FEMAG-CZ/OX,CZ processwith Induction Heating system,The interface shape and po
14、sition is a result of the simulation,FEMAGSoft 2012,Temperaturefield in the melt,Streamfunction,FEMAG-CZ/OX/CZ and KYROPOULOS process,FEMAGSoft 2012,Melt meshes,BLM(boundary layer mesh),Coarse mesh,BLM mesh is very important to simulate the interface,FEMAGSoft 2012,Local temperature field,Result usi
15、ng coarse mesh,Result using BLM mesh,BLM mesh enables a better prediction of the crystalisation interface,FEMAGSoft 2012,Velocity field,Result using coarse mesh,Result using BLM mesh,CONFIDENTIAL,FEMAG-HEM,FEMAG-HEM Software to simulate Sapphire Growth by Heat Exchange MethodSpecifications:Temperatu
16、re in the sapphire and in all furnace components by solving the global heat transfer in the furnace(radiation,conduction,convection).Flow velocity in the sapphire liquid phase.Crystallization front shape Advanced radiation heat transfer in the sapphireGas convectionAnisotropic thermal stresses in th
17、e crystal,CONFIDENTIAL,FEMAG-HEM,FEMAGSoft CAD tool to introduce the geometry,CONFIDENTIAL,FEMAG-HEM,Global Temperature in the furnace,CONFIDENTIAL,FEMAG-HEM,Melt convection,Detail of melt convection,CONFIDENTIAL,FEMAG-HEM,Temperature distribution in the crystal and melt for different times,Velocity
18、 amplitude distribution in the melt for different times,CONFIDENTIAL,Anisotropic Thermal Stress(HEM Sapphire A-axis),FEMAG-HEM quasi-steady simulation of the growth of a Sapphire crystal:3D von Mises invariant isovalues(Pa),FEMAG-HEM Example,CONFIDENTIAL,Anisotropic Thermal Stress(HEM Sapphire C-axi
19、s),FEMAG-HEM quasi-steady simulation of the growth of a Sapphire crystal:3D von Mises invariant isovalues(Pa),FEMAG-HEM Example,CONFIDENTIAL,FEMAG-OX to simulate CZ and Kyropoulos is available FEMAG-HEM to simulate HEM process is availableAdvanced radiation modelVery efficient(Parallel Software)Effi
20、cient melt flow calculation(laminar simulation)Thermal Stresses(A-axis,C-axis),Sapphire Growth Simulation-Conclusion,CONFIDENTIAL,Very fast solver less than one day to simulate a case Very accurate models Boundary Layer Mesh is unique and mandatory to capture the interface position Support service is very high standards,reactive and always ready to help 25 years of experience with international recognition,Sapphire Growth Simulation/Unique features of FEMAGSoft,
