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1、重离子辐照GaN,Page 2,能量为500keV剂量为51014/cm2的Au+辐照GaN及退火的X射线衍射分析图,Page 3,能量为500keV剂量为51015/cm2的Au+辐照GaN及退火的X射线衍射分析图,Page 4,Au辐照GaN的RBS/C研究,Page 5,Transport of Ions in Matter,E,Z1,E2,Z2,E1,Z1,1.If E2Edisp,then Atomic Displacement.2.If E1Edisp,E2Edisp,then Vacancy;If E2Edisp,Z1=Z2,then Replacement Collision,
2、E1 is released as Phonons;If Z1Z2,then Z1 becomes a stopped Interstitial Atom.4.If E1Edisp,E2Edisp,then Z1 becomes an interstitial Atom and E1+E2 is released as phonons.,Assume:Incident atom has atomic number Z1,energy E.collision within the target with an atom of atomic number Z2.After the collision,the incident ion has energy E1 and the struck atom has energy E2.,Page 6,Transport of Ions in Matter,Displacements=Vacancies+Replacement CollisionsVacancies+Replacement=Interstitials+(Atoms which leave the target volume),入射粒子产生级联碰撞的示意图,
